Process Development of Silicon-Silicon Carbide Hybrid...

MRS Proceedings 2001 / 1 Vol. 687

Process Development of Silicon-Silicon Carbide Hybrid Micro-Engine Structures

Choi, Dongwon, Shinavski, Robert J., Steffier, Wayne S., Hoyt, Skip, Spearing, S.Mark
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Volume:
687
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-687-b5.44
Date:
January, 2001
File:
PDF, 1.21 MB
english, 2001
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