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Preferential Sputtering Effects in Elemental Depth Profiling of Tellurium-Based Alloy Thin Films
Ross, R. C., Jones, G. L., Chao, S. S., deNeufville, J. P., Bjornard, E. J., Tyler, J. E.Volume:
69
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-69-141
Date:
January, 1986
File:
PDF, 584 KB
english, 1986