Growth of Carbon-Nitrogen Films with a Broad Beam RF Ion Source
Ingram, David C., Lanter, William C., DeJoseph, Charles A., Kayani, AsgharVolume:
693
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-693-i3.2.1
Date:
January, 2001
File:
PDF, 85 KB
english, 2001