Stress Hysteresis and Mechanical Characterization of...

MRS Proceedings 2001 / 1 Vol. 695

Stress Hysteresis and Mechanical Characterization of Plasma-Enhanced Chemical Vapor Deposited Dielectrics

Thurn, Jeremy, Cook, Robert F., Kamarajugadda, Mallika, Stearns, Laura C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
695
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-695-l3.9.1
Date:
January, 2001
File:
PDF, 118 KB
english, 2001
Conversion to is in progress
Conversion to is failed