An Analytical Model for Intrinsic Residual Stress Effect on...

MRS Proceedings 2001 / 1 Vol. 695

An Analytical Model for Intrinsic Residual Stress Effect on Out-of-Plane Deflection in Chemical-Vapor-Deposited Free-Standing Thick Film

Jeong, Jeung-hyun, Baik, Young-Joon, Kwon, Dongil
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Volume:
695
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-695-l6.20.1
Date:
January, 2001
File:
PDF, 68 KB
english, 2001
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