Novel Preparation Method of Thin Films by Ablation Plasma...

MRS Proceedings 2001 / 1 Vol. 697

Novel Preparation Method of Thin Films by Ablation Plasma produced by Intense Pulsed Ion Beam Evaporation

Yatsui, Kiyoshi, Suematsu, Hisayuki, Jiang, Weihua, Suzuki, Tsuneo, Yang, Sung-Chae, Kinemuchi, Yoshiaki, Hirai, Makoto, Kato, Keizo
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Volume:
697
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-697-p4.9
Date:
January, 2001
File:
PDF, 190 KB
english, 2001
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