Low Temperature Deposition of Transparent Ultra...

MRS Proceedings 2001 / 1 Vol. 711

Low Temperature Deposition of Transparent Ultra Water-Repellent Thin Films by Microwave Plasma Enhanced Chemical Vapor Deposition

Wu, Yunying, Inoue, Yasushi, Sugimura, Hiroyuki, Takai, Osamu
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Volume:
711
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-711-hh3.28.1
Date:
January, 2001
File:
PDF, 1.43 MB
english, 2001
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