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Ab-Initio Pseudopotential Calculations of Phosphorus Diffusion in Silicon
Liu, Xiang-Yang, Windl, Wolfgang, Masquelier, Michael P.Volume:
717
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-717-c4.7
Date:
January, 2002
File:
PDF, 191 KB
english, 2002