Processing influence on the reliability of platinum thin...

Processing influence on the reliability of platinum thin films for MEMS applications

Briand, Danick, Heimgartner, Stephan, Leboeuf, Mireille, Dadras, Massoud, Rooij, Nico F. de
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Volume:
729
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-729-u2.5
Date:
January, 2002
File:
PDF, 272 KB
english, 2002
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