Processing influence on the reliability of platinum thin films for MEMS applications
Briand, Danick, Heimgartner, Stephan, Leboeuf, Mireille, Dadras, Massoud, Rooij, Nico F. deVolume:
729
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-729-u2.5
Date:
January, 2002
File:
PDF, 272 KB
english, 2002