Nano-Scale Morphology and Electron Spectrum of Defect States in Low-k SiOCH Films
Ligatchev, V., Wong Rusli, T.K.S., Liu, B., Ostrikov, K.Volume:
737
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-737-f3.41
Date:
January, 2002
File:
PDF, 205 KB
english, 2002