Nanometer-scale Pattern Transfer Using Ion Implantation

MRS Proceedings 2002 / 1 Vol. 739

Nanometer-scale Pattern Transfer Using Ion Implantation

Matsuura, Naomi, Simpson, Todd W., McNorgan, Chris P., Mitchell, Ian V., Mei, Xiang-Yang, Morales, Patrick, Ruda, Harry E.
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Volume:
739
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-739-h8.3
Date:
January, 2002
File:
PDF, 436 KB
english, 2002
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