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Ion Implantation and Annealing of Oxides
White, C. W., Boatner, L. A., Sklad, P. S., Mchargue, C. J., Pennycook, S. J., Aziz, M. J., Farlow, G. C., Rankin, J.Volume:
74
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-74-357
Date:
January, 1986
File:
PDF, 1.54 MB
english, 1986