Radiation Damage Induced Transient Enhanced Diffusion of...

MRS Proceedings 1986 / 1 Vol. 74

Radiation Damage Induced Transient Enhanced Diffusion of Dopants in Silicon

Angelucci, R., Gabilli, E., Lotti, R., Negrini, P., Servidori, M., Solmi, S., Anderle, M.
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Volume:
74
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-74-505
Date:
January, 1986
File:
PDF, 233 KB
english, 1986
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