Comparative Studies of Thin-Film Ti-Si and Ti-SiO2 Rapid Thermal Reactions Using the RIP/TEM Technique
Natan, MenachemVolume:
74
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-74-679
Date:
January, 1986
File:
PDF, 1.80 MB
english, 1986