Material Properties and Process Compatibility of Spin-on...

MRS Proceedings 2002 / 1 Vol. 740

Material Properties and Process Compatibility of Spin-on Nano-foamed Polybenzoxazole for Copper Damascene Process

Enoki, Takashi, Maejima, Kenzo, Saito, Hidenori, Katsumura, Akifumi
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Volume:
740
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-740-i12.9
Date:
January, 2002
File:
PDF, 173 KB
english, 2002
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