Mesoscale Thin Film Actuator for Promoting Fluid Motion in Microfluidic and Nanofluidic Channels
Sadler, Daniel J., Singh, Gaurav, Zenhausern, Frederic, Saraf, Ravi F.Volume:
741
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-741-j1.2
Date:
January, 2002
File:
PDF, 153 KB
english, 2002