Fabrication Of Flat RF MEMS Switch Membrane By Minimizing Of Stress Gradients In The Au Membrane Structure
Kim, Jong-Seok, Song, Hoon, Cho, Jin Woo, Lee, Eun Sung, Park, Sun Hee, Lee, Mun Chul, Shim, Dong Hwa, Song, In Sang, Kim, Jung Woo, Kang, Seok Jin, Song, Ki MooVolume:
741
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-741-j5.2
Date:
January, 2002
File:
PDF, 173 KB
english, 2002