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Transport and Chemical Mechanisms in GaN Hydride Vapor Phase Epitaxy
Karpov, Sergey Yu., Segal, Alexander S., Zimina, Darya V., Smirnov, Sergey A., Sid'ko, Alexander P., Kondratyev, Alexey V., Makarov, Yuri N., Martin, Denis, Wagner, Volker, Ilegems, MarcVolume:
743
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-743-l3.40
Date:
January, 2002
File:
PDF, 172 KB
english, 2002