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Implant isolation of ZnO epitaxial layers
Kucheyev, S. O., Jagadish, C., Williams, J. S., Deenapanray, P. N. K., Yano, Mitsuaki, Koike, Kazuto, Sasa, Shigehiko, Inoue, Masataka, Ogata, Ken-ichiVolume:
744
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-744-m3.5
Date:
January, 2002
File:
PDF, 121 KB
english, 2002