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Strained-Si-on-Insulator (SSOI) and SiGe-on-Insulator (SGOI): Fabrication Obstacles and Solutions
Taraschi, Gianni, Pitera, Arthur J., McGill, Lisa M., Cheng, Zhi-Yuan, Lee, Minjoo L., Langdo, Thomas A., Fitzgerald, Eugene A.Volume:
745
Journal:
MRS Proceedings
DOI:
10.1557/proc-745-n4.7
Date:
January, 2002
File:
PDF, 791 KB
2002