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Trap Spectroscopy in Si3N4 Ultrathin Films Using Exoelectron Emission Method
Naich, M., Rosenman, G., Molotskii, M., Roizin, Ya.Volume:
745
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-745-n5.21
Date:
January, 2002
File:
PDF, 310 KB
english, 2002