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MOCVD of HfO2 from Alkoxide and Alkylamide Precursors
Roberts, John L., Williams, Paul A., Jones, Anthony C., Marshall, Paul, Chalker, Paul R., Bickley, Jamie F., Davies, Hywel O., Smith, Lesley M.Volume:
745
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-745-n5.9
Date:
January, 2002
File:
PDF, 719 KB
english, 2002