Characteristics of Ultra Shallow B Implantation with Decaborane
Li, Cheng, Albano, Maria A., Gladczuk, Leszek, Sosnowski, MarekVolume:
745
Journal:
MRS Proceedings
DOI:
10.1557/proc-745-n6.3
Date:
January, 2002
File:
PDF, 358 KB
2002