Physical and Electrical Characterization of Hafnium...

MRS Proceedings 2002 / 1 Vol. 745

Physical and Electrical Characterization of Hafnium Silicate Thin Films

Lysaght, Patrick S., Foran, Brendan, Bersuker, Gennadi, Larson, Larry, Murto, Robert W., Huff, Howard R.
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Volume:
745
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-745-n8.3/t6.3
Date:
January, 2002
File:
PDF, 970 KB
english, 2002
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