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Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography
Kim, Dong-Joo, Im, Jin Seo, Thompson, Carol, Streiffer, S. K., Wiederrecht, G., Auciello, O.Volume:
748
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-748-u4.5
Date:
January, 2002
File:
PDF, 1.36 MB
english, 2002