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Room temperature grain growth in sputtered Cu films
Deduytsche, D., Detavernier, C., Debaerdemaeker, J., Van Meirhaeghe, R.L., Dauwe, C., Kuan, T.S.Volume:
749
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-749-w12.6
Date:
January, 2002
File:
PDF, 1.97 MB
english, 2002