Laser Microfabrication Technology and its Application to...

Laser Microfabrication Technology and its Application to High Speed Interconnect of Gate Arrays

Bernhardt, Anthony F., McWilliams, Bruce M., Mitlitsky, Fred, Whitehead, John C.
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Volume:
75
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-75-633
Date:
January, 1986
File:
PDF, 1.62 MB
english, 1986
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