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Deposition of Low-Stress Encapsulants on InP and GaAs
Chakrabarti, U. K., Pearton, S. J., Barz, H., Vonneida, A. R., Short, K. T., Lee, J. W.Volume:
75
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-75-691
Date:
January, 1986
File:
PDF, 619 KB
english, 1986