Metrology Issues in Cu-Low-K Chemical Mechanical...

MRS Proceedings 2002 / 1 Vol. 750

Metrology Issues in Cu-Low-K Chemical Mechanical Planarization

Zantye, Parshuram B., Sikder, Arun K., Thagella, Swetha, Gulati, Nivedita, Kumar, Ashok
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Volume:
750
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-750-y9.7
Date:
January, 2002
File:
PDF, 590 KB
english, 2002
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