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Laser Microfabrication Technology and its Application to High Speed Interconnect of Gate Arrays
Bernhardt, Anthony F., McWilliams, Bruce M., Mitlitsky, Fred, Whitehead, John C.Volume:
76
Journal:
MRS Proceedings
DOI:
10.1557/proc-76-223
Date:
January, 1986
File:
PDF, 907 b
1986