Determination of Space Shift of Si / SiGe / Si...

MRS Proceedings 2003 / 1 Vol. 768

Determination of Space Shift of Si / SiGe / Si Heterojunction's Cap Layer by Grazing-angle Incidence X-ray Backiffraction Technique

Bezirganyan, Siranush E., Bezirganyan, Hayk H., Bezirganyan, Hakob P., Bezirganyan, Petros H.
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Volume:
768
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-768-g3.1
Date:
January, 2003
File:
PDF, 216 KB
english, 2003
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