High Temperature Implantation of Single Crystal Beta...

MRS Proceedings 1986 / 1 Vol. 77

High Temperature Implantation of Single Crystal Beta Silicon Carbide Thin Films

Edmond, J. A., Withrow, S. P., Wadlin, W., Davis, R. F.
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Volume:
77
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-77-193
Date:
January, 1986
File:
PDF, 1.18 MB
english, 1986
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