Characterization of Electrostatic Micromembrane Actuator...

MRS Proceedings 2003 / 1 Vol. 782

Characterization of Electrostatic Micromembrane Actuator Performance Using a Mass Probing Method

Wu, Xingtao, Hui, Jeremy, Kayatta, Pat, Kenneth, Dedeian, Young, Mariam, Warde, Cardinal
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Volume:
782
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-782-a4.2
Date:
January, 2003
File:
PDF, 797 KB
english, 2003
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