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Ceramic Microfabrication Techniques for Microdevices with Three-Dimensional Architecture
Nair, Balakrishnan, Wilson, Merrill, Akash, Akash, Crandall, Joe, Lewinsohn, Charles, Cutler, Raymond, Flinders, MarcVolume:
782
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-782-a5.30
Date:
January, 2003
File:
PDF, 2.06 MB
english, 2003