Cu-Compatible Ultra-High Permittivity Dielectrics for...

MRS Proceedings 2003 / 1 Vol. 783

Cu-Compatible Ultra-High Permittivity Dielectrics for Embedded Passive Components

Ihlefeld, Jon F., Kingon, Angus I., Borland, William, Maria, Jon-Paul
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Volume:
783
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-783-b3.2
Date:
January, 2003
File:
PDF, 337 KB
english, 2003
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