Improvement of Tantalum Pentoxide Metal-Insulator-Metal...

MRS Proceedings 2003 / 1 Vol. 783

Improvement of Tantalum Pentoxide Metal-Insulator-Metal Capacitors For SiGe RF-BiCMOS Technology

Sun, Hongjiang, Lau, Ka Man, Aksen, Eyup, Bell, Nancy
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Volume:
783
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-783-b7.6
Date:
January, 2003
File:
PDF, 378 KB
english, 2003
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