Study of work function of CVD WSix thin film on high K...

MRS Proceedings 2003 / 1 Vol. 786

Study of work function of CVD WSix thin film on high K dielectric.

Maîtrejean, S., Allégret, S., Fillot, F., Farjot, T., Guillaumot, B., Passemard, G.
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Volume:
786
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-786-e6.32
Date:
January, 2003
File:
PDF, 1.49 MB
english, 2003
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