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Fast Neutral Ar Penetration during Gas Cluster Ion Beam Irradiation into Magnetic Thin Films
Kakuta, Shigeru, Seki, Toshio, Sasaki, Shinji, Furusawa, Kenji, Aoki, Takaaki, Matsuo, JiroVolume:
792
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-792-r9.36
Date:
January, 2003
File:
PDF, 69 KB
english, 2003