Fast Neutral Ar Penetration during Gas Cluster Ion Beam...

Fast Neutral Ar Penetration during Gas Cluster Ion Beam Irradiation into Magnetic Thin Films

Kakuta, Shigeru, Seki, Toshio, Sasaki, Shinji, Furusawa, Kenji, Aoki, Takaaki, Matsuo, Jiro
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Volume:
792
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-792-r9.36
Date:
January, 2003
File:
PDF, 69 KB
english, 2003
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