The Influence of Predeposition of Nonolayer Thin Titanium...

MRS Proceedings 1986 / 1 Vol. 83

The Influence of Predeposition of Nonolayer Thin Titanium Filns Upon the Crystallography of Subsequently Formed Pd2Si Layers on (100) Silicon

McGinn, J. T., Hoffman, D. M., Thomas, III, J. H., Tams III, F. J.
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Volume:
83
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-83-231
Date:
January, 1986
File:
PDF, 1.40 MB
english, 1986
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