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An Electrical Characterization of Sol Films Using Devices Formed by Oxygen Implant and Rapid Thermal Processing
Whitfield, Jim D., Burnham, Marie E., Varker, Charles J., Wilson, Syd.R.Volume:
92
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-92-241
Date:
January, 1987
File:
PDF, 353 KB
english, 1987