Co-Implantation of Si And Be in GaAs by Rapid Thermal...

MRS Proceedings 1987 / 1 Vol. 92

Co-Implantation of Si And Be in GaAs by Rapid Thermal Annealing

Yu, Tan-Hua, Wang, Sujane
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Volume:
92
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-92-411
Date:
January, 1987
File:
PDF, 931 KB
english, 1987
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