Carrier and Atomic Distributions in Si Implanted and Rapid...

MRS Proceedings 1987 / 1 Vol. 92

Carrier and Atomic Distributions in Si Implanted and Rapid Thermally Annealed InP ; Influence of Dual Implants of As or P

DUIIAMEL, Nicole, DESCOUTS, Brigitte, KRAUZ, Philippe, RAO, Krishna, DANGLA, Jean, HENOC, Pierre
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Volume:
92
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-92-443
Date:
January, 1987
File:
PDF, 873 KB
english, 1987
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