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A Two Step Rapid Thermal Annealing Process for Be Implant Activation in GaAs
Plumton, D.L., Duncan, W.M., Tran, L.T.Volume:
92
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-92-475
Date:
January, 1987
File:
PDF, 357 KB
english, 1987