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Characterization of Shallow Junctions Fabricated by Gas Immersion Laser Doping (Gild)
Carey, P.G., Turner, J. E., Nauka, K., Reid, G. A., Sigmon, T. W.Volume:
92
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-92-65
Date:
January, 1987
File:
PDF, 1.44 MB
english, 1987