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Adhesion of Reactive Ion Implanted Copper Films on Al2O3 and SiO2
Madakson, P. B., Baglin, J. E. E.Volume:
93
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-93-41
Date:
January, 1987
File:
PDF, 1.23 MB
english, 1987