Atomic Profiles of High Energy (MeV) Si Implanted into GaAs

MRS Proceedings 1987 / 1 Vol. 93

Atomic Profiles of High Energy (MeV) Si Implanted into GaAs

Thompson, Phillip E., Wilson, Robert G., Ingram, David C., Pronko, Peter P.
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Volume:
93
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-93-73
Date:
January, 1987
File:
PDF, 631 KB
english, 1987
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