Phosphorus and Boron Doping of a-Si:H Effects of Deposition Temperature
Pruppers, M. J. M., Maessen, K. H. M., Bezemer, J., Habraken, F. H. P. M., van der Weg, W. F.Volume:
95
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-95-131
Date:
January, 1987
File:
PDF, 257 KB
english, 1987