Design of freeform lens with TFMG reflector for UV-LEDs lithography system
Pan, C.T., Yang, T.L., Chen, Y.C., Chang, C.M., Hsu, J.H., Huang, J.C.Volume:
127
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2016.04.110
Date:
September, 2016
File:
PDF, 1.39 MB
english, 2016