Micro Through-hole Array in top Electrode of Film Bulk...

Procedia Engineering 2015 Vol. 120

Micro Through-hole Array in top Electrode of Film Bulk Acoustic Resonator for Sensitivity Improving as Humidity Sensor

Zhang, Mengying, Du, Lidong, Fang, Zhen, Zhao, Zhan
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Volume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.703
File:
PDF, 459 KB
english, 2015
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