[IEEE 2016 China Semiconductor Technology International...

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[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Sub-Fin solid source doping in the 14nm and sub-14 FinFET device

Yan, Wen, Zhou, Fei, Wei, Chengqing, Zhao, Hai, Xu, CanYang, Li, Yong, Ju, Jianhua, Yang, Weiguang
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Year:
2016
Language:
english
DOI:
10.1109/CSTIC.2016.7464040
File:
PDF, 574 KB
english, 2016
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